Used LAM RESEARCH 2300 Versys KIYO Poly #9292953 for sale

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ID: 9292953
Vintage: 2006
Etcher, 12" Does not included Hard Disk Drive (HDD) Power rating: 208 AC 3-Phase 400A (3) Loadports V2 mainframe Chemicals / Gases Used: Chm/Unit position 1: SiCI4, HBr, CI2, CF4, 02, He, CH2F2, Ar, 30° Chm/Unit position 2: SiCI4, HBr, CI2, CF4, 02, He, CH2F2, Ar, 30° Chm/Unit position 3: SiCI4, HBr, CI2, CF4, 02, He, CH2F2, Ar, 30° Chm/Unit position 4: SiCI4, HBr, CI2, CF4, 02, He, CH2F2, Ar, 30° 2006 vintage.
LAM RESEARCH 2300 Versys KIYO Poly etcher/asher is an advanced piece of equipment, designed for reliability and high performance in the etching and ashing processes. It has a single large chamber capable of accommodating two processes concurrently, making it ideal for highthroughput production. The versatile design of 2300 Versys KIYO Poly etcher/asher provides users with a variety of tools and its powerful process features enable users to customize their operations. The chamber is built to be very robust and with its unique materials selection and design, it can withstand extreme temperatures, pressures, and aggressive chemicals without issue. The chamber also includes special sub-ambient cooling through the use of a molecular sieve. The dual process performs quick and efficient etching and ashing, both processes being carried out within the same chamber. The etcher uses LAM RESEARCH Flip Etch Technology (FET) with integrated process and device control intelligence. The ashing technology in LAM RESEARCH 2300 Versys KIYO Poly etcher/asher, known as CAT-M Carbides Asher, is designed to manage particles and selectivity determine the best ashing strategy for bottom or top layers. It produces layer-selective results and the residue reduction rate is up to 97% and 99.9% for poly H-CMP. The platform also offers maintenance environments that are designed to provide the customer with fast service response and quick breakdown diagnosis. As a result, downtime is reduced and process yields are increased. 2300 Versys KIYO Poly etcher/asher is also designed to be energy efficient and come with a power monitoring system, which helps to ensure optimal conditions for consistent use. LAM RESEARCH 2300 Versys KIYO Poly etcher/asher is the ultimate tool for high-throughput etching and ashing processes. Its reliability, performance, and advanced features make it the ideal choice for a number of applications in the semiconductor industry. Its versatility combined with its ease of use offer a process that is sure to meet any user's needs.
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