Used LAM RESEARCH 2300 Versys Kiyo #9240730 for sale

ID: 9240730
Wafer Size: 12"
Vintage: 2005
Polysilicon etcher, 12" Includes: 2300 Frame (2) Exelan flex chambers (2) Kiyo FX chambers LAM RESEARCH Kiyo MCX Chamber (3) LAM RESEARCH Kiyo chambers 2005 vintage.
LAM RESEARCH 2300 Versys Kiyo is an advanced etcher/asher that is well-suited for a variety of applications. It combines high performance gas delivery and control, robust mechanical design, and intuitive user interface tools to provide a powerful solution for etching and ashing processes. As an etcher, 2300 Versys Kiyo provides precision etching capabilities with up to 50 different etch recipes. The machine also allows for up to 300 wafer positions that can hold either 8 inch or 12 inch wafers. Each etch recipe is programmed with optimized parameters such as substrate shape, shading, and etch depth. LAM RESEARCH 2300 Versys Kiyo is designed to be an efficient process tool for etching applications. The process chamber has a maximum capacity of 6 liters and can process up to 6 wafers at a time. The tool also includes a wafer direct-view alignment equipment with auto-focus capabilities for image overlay during reticles for reduced fabrication time. Additionally, the tool includes a Gas Mixing System that provides the precise control of gas mixtures required for advanced etching processes. This gas mixing unit features a fully automatic gas source selection and control so users can quickly program and optimize the process. 2300 Versys Kiyo also provides a number of safety features to ensure safe operation. The tool is equipped with a dual-stage vacuum machine with both a turbo-molecular pump and an ion-getter secondary pump. This ensures that the chamber remains at a safe vacuum level during operation. The machine also features an oxygen alarm tool that will alert the operator if there is an unsafe buildup of oxygen in the chamber. Overall, LAM RESEARCH 2300 Versys Kiyo is a reliable and powerful etcher/asher that provides precise results for a variety of etching applications. Its user-friendly interface, advanced gas control and safety features make it an ideal solution for production-level etching and ashing processes. With its robust mechanical design and precise gas delivery asset, 2300 Versys Kiyo is a reliable and efficient solution for the etching and ashing of a variety of substrates.
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