Used LAM RESEARCH 2300 Versys Metal #293829553 for sale
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ID: 293829553
Chamber
Quick clean kits
Pendulum valve clean kits
Chamber manometer filter
Wafer clamping mechanism: Bipolar ESC, Ceramic
Edge ring: Standard
ESC Hose kit: Standard with shaft seal
ESC Facility plate: Compression facility plate
Chamber manometer: Standard
Wafer lift mechanism: Direct drive
Focus ring: Ceramic
Capacitance lock: No capacitance lock
Voltage control interface: 1200V
Gas feed: Top
O-rings: Chemraz
TCP Coil plating: Improved coil plating
200MM Turbo pump: 2200 L/s BOCE (Seiko Seiki)
Endpoint detection: Optical emission spectroscopy
Chamber isolation valve: Chemraz seal door on VAT Rkr
Lower isolation valve: Chemraz (-101)
Pump to TCU: 50ft
TCU to PM: 100ft
PM to Pump interconnect: 100ft
TCU to RPDB: 50ft
Pump to RPDB: 50 ft
Gas box:
Mounting location: Transport module
Door: Window
Primary valve options: Lock-out tag-out manual valve
Facilitization: No gas interface box
Gas system exhaust: Top exh (Heat and smoke ABTMNT)
Gas system metrology
Primary proc gas line valves: CIP
Secondary proc gas line valves: CIP
Jetstream gas box:
Config MFC by Line? : Yes: Line by line
(16) Process gas lines
Heated gas lines option heated lines: Pos 1 & 2
Manifold options: Multi-exit
Peripherals:
Metal etch backing pumps cust: Supply: IH-600
Metal etch TCU config cust supply: 4080 Plus
PEDB
TCU Hose kit: Lam supplied
TCU to PM hose type: Standard
Gas box config:
Line / MFC Type / Gas type / Gas Flow / Heated / Facilitization
Line 01 / - / No gas / - / - / Yes / No
Line 02 / SD519 / BCL3 / 500 / Yes / No
Line 03 / SD519 / O2 / 200 / No / No
Line 04 / SD519 / CL2 / 300 / No / No
Line 05 / SD519 / NF3 / 200 / No / No
Line 06 / - / No gas / - / No / No
Line 07 / SD519 / SF6 / 200 / No / No
Line 08 / SD519 / N2 / 500 / No / No
Line 09 / SD519 / CF4 / 200 / No / No
Line 10 / SD519 / AR / 500 / No / No
Line 11 / SD519 / HE / 300 / No / No
Line 12 / - / No gas / - / No / No
Line 13 / - / No gas / - / No / No
Line 14 / - / No gas / - / No / No
Line 15 / - / No gas / - / No / No
Line 16 / - / No gas / - / No / No.
LAM RESEARCH 2300 Versys Metal is a cutting-edge etcher and asher designed specifically for metal layers in advanced semiconductor manufacturing processes. This equipment incorporates innovative technology and features to deliver precise and reliable etching and ashing performance for high-volume production environments. At the core of 2300 Versys Metal is its advanced process capability, which allows for the etching and ashing of various metal layers with exceptional uniformity and selectivity. This system is capable of handling a wide range of metals commonly used in semiconductor manufacturing, including aluminum, copper, titanium, and tungsten. The versatile process capability of LAM RESEARCH 2300 Versys Metal makes it well-suited for a variety of applications, such as metal gate etching, metal contact patterning, and metal removal in advanced logic and memory devices. The key components of 2300 Versys Metal include a high-performance plasma source, advanced gas delivery unit, precision substrate handling platform, and intuitive process control software. The plasma source generates a highly reactive plasma that enables efficient etching and ashing of metal layers, while the gas delivery machine controls the flow and composition of process gases to achieve optimal process conditions. The precision substrate handling platform ensures accurate alignment and control of wafers during processing, while the process control software provides user-friendly interface for recipe development, process monitoring, and data analysis. One of the notable features of LAM RESEARCH 2300 Versys Metal is its advanced endpoint detection capability, which allows for real-time monitoring of the etching and ashing process to achieve precise control over process endpoints. This feature is essential for achieving uniformity and repeatability in metal layer etching and ashing, as it enables the tool to automatically stop the process once the desired endpoint is reached. Additionally, the asset is equipped with advanced chamber cleaning capabilities to maintain process cleanliness and prevent cross-contamination between different metal layers. 2300 Versys Metal is designed with productivity and cost efficiency in mind, featuring a high throughput and low cost of ownership. This model is capable of processing a large number of wafers per hour, making it ideal for high-volume production environments. The equipment also incorporates energy-efficient technologies to minimize power consumption and reduce operating costs over the lifetime of the equipment. In summary, LAM RESEARCH 2300 Versys Metal is a state-of-the-art etcher and asher system tailored for metal layer processing in advanced semiconductor manufacturing. With its advanced process capability, precision control features, and high throughput performance, this unit provides semiconductor manufacturers with a reliable and cost-effective solution for etching and ashing metal layers in cutting-edge semiconductor devices.
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