Used LAM RESEARCH 2300 Versys #9033337 for sale

LAM RESEARCH 2300 Versys is an advanced etching / ashing equipment used to create integrated circuit devices. It combines convection, thermal and plasma technologies to allow users to achieve superior performance in asher processes, resulting in shorter cycle times, higher productivity, and an improved process window. This tool is currently being used in some of the world's leading integrated circuit (IC) fabrication facilities. The Versys's robust design includes a unique chamber and platform cooling system, providing a superior temperature balance and superior etching/ashing stability. It features a single-drive transfer unit, which enables fast and flexible response, as well as an advanced automatic loading device that ensures a reliable process. The Versys is capable of processing multiple substrate sizes and offers a wide variety of etch/ash solutions, ranging from DRIE, Plasma Enhanced CVD (PECVD), sputter, and Etch-Then-Clean (ETC) processes. Additionally, its Integrated Thermal Processing (ITP) technology minimizes substrate damage and etch cycle time, and its "touchless" ITP enables temperature maintenance in the processing chamber. The machine also includes a two-stage cyclonic scrubber, eliminating the need for additional subsystems, and ensuring optimal process control. Additionally, the Versys has both single- and dual-level boats, allowing it to accommodate both small and large substrates within the same substrate sizes. 2300 Versys is an excellent choice for users seeking high-performance etching/ashing solutions. With its advanced technology, robust design, and wide range of process options it is highly recommended for integrated circuit fabrication. Its advanced etch and ash process capabilities, superior temperature balance, and precise substrate size handling, make it one of the most effective and reliable etching/ashing systems available on the market today.