Used LAM RESEARCH 2300 Versys #9036038 for sale
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ID: 9036038
Dry etcher
Parts list:
4 Chambers : 2 PM/2 Strip
Robot: L/L => Brooks, TR/CH => MAG7
Generator : Apex 1500/13 (2 ea), RFDS (2 ea)
RPS: AX-2630 LRC-Q (2 ea), F120160-3(MKS) (2 ea)
TMP: STP-A2203 (2 ea)
Gas box: Enhanced gas box (Digital 12 line) (4 ea).
LAM RESEARCH 2300 Versys is an innovative etcher and asher that provides advanced processing capabilities for advanced device technologies. The Versys platform is designed for scalability, allowing manufacturers to upgrade their production capacity as technology advancements and new device nodes are developed. The all-new 2300 Versys is equipped with an advanced substrate transfer robot and capable of a wide variety of etching and ashing processes. It has a maximum capacity of five 300 mm wafers, with a process time of up to 300 seconds. It also features a cutting-edge high resolution closed-loop local area scanner, providing the ultimate accuracy and precision for all etching and ashing operations. The advanced LAM RESEARCH 2300 Versys is capable of handling etching, ashing, and cryo-etching processes. The etching and ashing process involves the removal of layers of material to produce a designed pattern on the substrate. Etching and ashing are used in the fab process to pattern features of various sizes and shapes, such as metal lines, transistors, and capacitors. 2300 Versys is also capable of cryo-etching. In this process, extreme cold is used to etch away unwanted material. This cold-etching process is essential for technologies such as 110nm and below, where extreme precisionis necessary. LAM RESEARCH 2300 Versys also ensures superior uptime and productivity due to its advanced technologies which reduce process time and optimize the process distribution. The Versys system is compatible with a variety of materials, from easy-to-machine dielectrics such as SiO2 and SiN, to harder-to-machine materials as well as metals. This ensures that 2300 Versys is well-suited for many different application scenarios. From the chip designer's perspective, the Versys architecture allows for immense amounts of flexibility, allowing for more custom patterns to be produced with the addition of custom recipes. Furthermore, the system has a proven record of delivering superior results while being flexible enough to handle future technologies. All in all, LAM RESEARCH 2300 Versys is a superior and advanced etcher and asher that offers high-end processes, scalability, and ultimate accuracy and precision. It's a perfect system for companies that deal with the latest technologies and want to ensure maximum productivity and quality.
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