Used LAM RESEARCH 2300 #9032646 for sale
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ID: 9032646
Transfer module (TM) only
Mag7
Monitor missing
No chamber and gas box
Currently in a warehouse
2006 vintage.
LAM RESEARCH 2300 is a state-of-the-art etcher / asher used for thin film deposition and processing. It is a highly sophisticated automated precision plating tool that can be used for a variety of applications in industries such as semiconductor, flat panel display (FPD) and thin film photovoltaic (PV) manufacturing. 2300 provides the ability to generate up to 4,096 independent wafer patterns when used with the optional multi-wafer platform. It also features advanced process control with pre-programmable recipes and real-time process monitoring, as well as modular designs that can support up to 8 process stations and up to 8 process chambers. LAM RESEARCH 2300 is equipped with an integrated resist delivery system, laser guided auto-wettability profiling (LGS-AWP) and other advanced process technologies that reduce deposition costs and minimize processing time. The machine is capable of delivering a complete plating solution, from preprocessing to post-processing, with high repeatability and uniformity over a wide range of wafer sizes. Its fast thermal profile eliminates the need for manual wafer masking, while its solid-state power sources provide excellent power output stability and tight repeatability of the recipe. Additionally, with preprogrammed recipes and real-time process monitoring, 2300 provides excellent process uniformity and performance. It is a reliable and sophisticated etching / asher choice for advanced precision thin film deposition and processing needs.
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