Used LAM RESEARCH 2300 #9197892 for sale
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ID: 9197892
Vintage: 2011
Etcher
Model: Syndion
Flow rate:
Vibration: ±2%
Digital MFC
Gases Size Purity
C4F8 400 sccm 99.999% (5N)
SF6 1800 sccm 99.999% (5N)
Ar 200 scm 99.9995% (5N5)
O2 200 sccm 99.999% (5N5)
CF4 500 sccm 99.999% (5N5)
Pressure:
PM Pumpdown:
500mTorr
APC Valve open
LL Pumpdown:
80mTorr
Gate valve open
Temperature: ±2° C Vibration
Forward power: ±1% Vibration
Ref power: ±1% Vibration
Process module configuration:
Transport
L/L Chamber: Dry pump pumping speed: 37 m³/h
Etch process chamber (Type: Syndion)
Power system:
TCP Generator (AE 3000W)
Bias generator (AE 2000W)
Pressure system:
MKS Gauge (100mTorr / 500mTorr / 10000mTorr)
ESC (Monopolar)
Dry pump not included
2011 vintage.
LAM RESEARCH 2300 is an advanced etcher or asher designed for the fabrication of microelectronic components. This state-of-the-art equipment provides the precise control required for creating precise patterns and circuits on microchips, enabling the production of high-performance components for applications such as systems on chips (SOCs), sensors and microcontrollers. 2300 employs a multi-level etching process involving physical vapor deposition (PVD) and chemical vapor deposition (CVD) that allows for the uniform and consistent etching of many different materials, including aluminum, copper and polysilicon. The CVD process, in particular, is used for the deposition of thin films and for creating intricate patterns on microchips. LAM RESEARCH 2300 supports a range of applications, including the etching of sub-micron patterns, the thinning of substrates, and the deposition of various layers of materials. Thanks to its advanced technology, the system can also achieve semiconductor components as thin as 100nm or lower. Other features of 2300, such as its advanced control unit, allow for superior accuracy, repeatability, and extended longevity. Thanks to LAM RESEARCH 2300, accurate and consistent profile etching is achievable with minimal complexity. The machine is also known for its excellent process repeatability, which is essential for high-volume production, and its automated recipe-based process control. Overall, 2300 is an invaluable tool for the production of high-performance, reliable microelectronics components. Its sophisticated process control and repeatability capabilities, combined with its versatile range of applications, make it the perfect choice for high-precision microchip etching.
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