Used LAM RESEARCH 2300 #9407004 for sale
URL successfully copied!
Tap to zoom
ID: 9407004
Vintage: 2006
Etcher
EFEM
TM
AC Rack
Spare parts
(4) PTC LANTRA 1300
Load port
RF Cart
Gas frame
RPDB
Gas box
2006 vintage.
LAM RESEARCH 2300 is an industry leading, advanced wet etching / ashing equipment developed by LAM RESEARCH Corporation. This system is specifically designed for processing high density semiconductor wafers and providing superior etching consistency and uniformity. 2300 unit was designed to provide a higher level of performance than previously available wet etching systems, and features award-winning, patented technology to provide industry-leading etch rates, uniformity, and accuracy. LAM RESEARCH 2300 consists of a Chemical Delivery Machine (CDS) which provides a comprehensive range of process gases, as well as two Heat Exchangers for precise control of substrate temperature. Both the CDS and Heat Exchangers are actively maintained and optimized via the embedded controller to ensure reliable, repeatable, and consistent etching performance. 2300 also includes a process chamber that houses an advanced etcher plasma generating source. This unique source is capable of generating a large range of different plasma types and frequencies, and works in unison with the CDS and Heat Exchangers to provide superior etching results across the entire density of wafers. Furthermore, LAM RESEARCH 2300 tool is easy to install and maintain, and features a large variety of safety and diagnostic features to help ensure reliable and safe operation. The asset is also compatibile with a wide range of wafer carriers and supports up to four-million wafers per day, providing an extremely high throughput for large-scale production. In conclusion, 2300 is a powerful, advanced etching and ashing model that provides the highest levels of performance and reliability. The equipment's combination of industry-leading hardware and software ensures superior results across a wide range of process and substrate types,while its intuitive design and diagnostic capabilities simplify setup and maintenance.
There are no reviews yet