Used LAM RESEARCH 2300e4 Exelan Flex DX #293601041 for sale
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ID: 293601041
Wafer Size: 12"
Vintage: 2017
Dielectric etcher, 12"
Seismic bracket TM
Weight dist plate TM
(3) Seismic brackets PM
(3) 2300 Flex DX
2300e4 Platform
2300 Process module
2300 Flex D Series option
(3) 4XX Series ESCs
(3) PM Facilities: Dual with temp monitor
(3) Flow meters: 10 GPM
(3) eDGF+ Gas feeds
Dual zone ESC Cooling flex
D Series
Heated foreline manometer
Top Pl Chamber manometer
Baffle
Lower isolation valve: Viton
Chemraz vacuum valve
Interconnect hardware:
Pump to TCU 100ft
TCU to PM 100ft
(3) Interconnect hardware: Pump to PM 100ft
EMO Cables:
(3) TCU to RPDB 50 ft
(3) Pump to RPDB 50 ft
2300 Flex D Series quick clean kit
2300 Gas box
2300 Flex D Series Jetstream
(3) Jetstream gas lines
(6) Heated gas lines
(51) HORIBA D519
(17) SST Facility interface boxes
(17) SST Facility interface boxes
UI Display with disp trans
(16) UI Display with disp trans
2300 Platform (E)
(3) Hermos carrier ID
Additional load port
(3) Corrosion resistant LPM
WIDS Btm read
RGV / OHT PIO Sensor
Conditioning station (7 Wafer)
AUX Buffer: 25 Slot
Vespel wafer finger
EDWARDS iXL
Vespel single sense
Advanced aligner
User Interface: Side and front monitor
System UPS circuitry
Internal UPS bypass with UPS
Earth leakage breaker
Cable: TM-Subpanel, 100 ft
Signal light tower, R-G-A Slim line
Light curtain
Input buffer corr res without Exh
Flow monitoring
System calibration and alignment
Service step for PM
Ionizer kit
ATM Duct interface
Robot CDM
Light tower buzzer
Metric to inch conv fittings
APCS
SVID and facility interface board
VTM Breakout board / cover
2nd TM Pump standard with EQ
2300 Peripheral
(3) Non-qual 2-Channel TCU
Gateway communication
2300 Ship ahead
Standard ship ahead item
2300 Additional enhancement
Standard process quality
Standard training
Wafer flow tuning
APC Recipe tuning host
2nd HSMS
NSR 8423, Hardware firewall
EDA2
NSRL 1000
Generator: 60 MHz
2017 vintage.
LAM RESEARCH 2300e4 Exelan Flex DX is an advanced, high-throughput etcher / asher designed to create highly precise microstructures. This etcher / asher comes equipped with a wide range of etching capabilities and is capable of producing highly detailed and accurate layers of etched substrate. The equipment utilizes advanced technologies to easily process materials such as silicon and compound semiconductors. 2300e4 Exelan Flex DX features a high-speed scan mechanism, which is capable of quickly scanning large-sized targets with its high-magnification optical system. This unit also features the latest laser technologies, ensuring extreme accuracy and precision when etching. In addition, the etcher / asher is also equipped with a range of customized etch recipes, which can be used to produce highly specific structures. This makes it easier for users to fabricate a variety of structures with ease. The machine also offers enhanced process control, which guarantees a higher level of process repeatability and optimization. Aside from its etching capabilities, LAM RESEARCH 2300e4 Exelan Flex DX also comes with advanced cooling systems, which ensures optimal performance and longer machine life. It also features a programmable logic controller (PLC), which allows customers to adjust the tool parameters according to their exact needs. The asset also features several safety features, such as emergency stop buttons and interlocks, reducing the risk of accidents. Additionally, maintenance and service functions are built into the model, allowing users to easily keep the equipment functioning at optimal levels. In conclusion, 2300e4 Exelan Flex DX is an advanced etcher / asher that is capable of producing highly detailed and accurate layers of etched substrate. It comes equipped with a range of customized etch recipes, advanced cooling systems, and advanced safety features, making it a dependable and reliable etcher / asher for industrial and research applications.
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