Used LAM RESEARCH 2300e4 Exelan Flex DX #9354411 for sale

LAM RESEARCH 2300e4 Exelan Flex DX
ID: 9354411
Wafer Size: 12"
Dielectric etcher, 12".
LAM RESEARCH 2300e4 Exelan Flex DX is an etcher/asher equipment designed for advanced semiconductor processing applications. It offers fast, flexible, and repeatable processing of semiconductor wafers using optimized, advanced etch and asher processes. This system is specifically designed to handle challenging jobs in advanced semiconductor processing. The 2300e4 unit provides fast and repeatable wafer processing through its flexible processing and advanced etch/asher recipe control. The processing heads ensure rapid movement across wafers with precision, even when processing multiple different geometries. With its "Smart Processor" feature, the 2300e4 machine can automatically adjust recipe parameters to optimize etch or asher rates, yielding higher quality results. The 2300e4's built in feature set ensures repeatable and reliable results. Automated endpoint detection and process monitoring help maintain uniformity and uniform wafer thickness. These features, along with a robust environmental management tool, result in the lowest possible defect rate, along with consistent etch/asher rate and uniformity. The 2300e4 asset includes a high-performance, low-maintenance software package. The software package provides easy-to-use and powerful graphical user interfaces, diagnostic and process control, recipe building, process log, and recipe management features. The model also includes a robust library of etch/asher recipes which can be edited and customized as needed. The equipment also provides full-scale process monitoring and validation to ensure consistent etch/asher rates. 2300e4 Exelan Flex DX etch/asher system is engineered for reliable, efficient, and repeatable processing of multi-geometry semiconductor wafers. This unit offers fast, flexible, and repeatable processing with advanced etch/asher recipe control. The built-in feature sets provide automated endpoint detection and process monitoring for uniformity and uniform wafer thickness. The user-friendly and powerful graphical user interfaces make etch/asher recipe building and process control easy to use. The 2300e4 machine is an ideal solution for advanced semiconductor processing applications, yielding improved process yields and uniformity.
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