Used LAM RESEARCH 2300e4 Exelan Flex DX #9385677 for sale

LAM RESEARCH 2300e4 Exelan Flex DX is a dry etcher / asher designed for high-volume three-dimensional electronics and large area deposition applications. It offers considerable improvement over other etchers and ashers in terms of throughput, process control, and process repeatability. 2300e4 Exelan Flex DX has an advanced deposition process that allows its use in a variety of applications. It is commonly used for thin film deposition, as well as etching and ashing of large area substrates. It has four selectable sources including XeF2, O2, NF3, Cl2, and Ar. The Exelan Flex DX can be configured to accommodate a wide range of materials and substrates. One of the key advantages of LAM RESEARCH 2300e4 Exelan Flex DX is its high-throughput capability. It is capable of producing up to 37u layers per hour, depending on the configuration and process parameters used. The etcher / asher is fully automated for accurate and repeatable processes, with embedded process control and process monitoring. 2300e4 Exelan Flex DX also offers superior process quality. Its adjustable plasma density and pressure control ensures improved uniformity and repeatability of the deposition process. The Exelan Flex DX is also equipped with an advanced cleaning system, which helps streamline the cleaning process and improve process repeatability. Additionally, LAM RESEARCH 2300e4 Exelan Flex DX offers several important safety features. These include an auto-shutdown feature in case of an emergency or process irregularity, as well as load-lock and substrate holder safety systems. These safety features enable the etcher / asher to be used in a wide range of applications with minimum risk. Overall, 2300e4 Exelan Flex DX is an advanced etcher / asher designed for high-volume three-dimensional electronics and large area deposition applications. It offers superior throughput and process quality, as well as important safety features to ensure optimal safety and process repeatability.