Used LAM RESEARCH 2300e4 Exelan Flex DX #9385701 for sale

LAM RESEARCH 2300e4 Exelan Flex DX is an etcher/asher which features several advanced technologies for precision control, flexibility, and performance. This equipment is powered by LAM's Exelan Flex DX control system, which offers full software integration and a comprehensive range of features including selectable O2 ETCH or high-rate O2 asher operation, extended etch control, temperature-based process control, and temperature profiling. The unit includes a 4-position, 42-in4, process-qualified hearth with a movable heater assembly for optimal uniformity. The hearth is lined with a ceramic-clad refractory material for maximum operating temperatures up to 1600°C and an optional 250-watt RF generator for VHF or ECR etching. The Exelan Flex DX software allows for easy and precise process setup and simulation, and allow users to save up to 64 process recipes with their own custom parameters. The integrated gas delivery machine is unmatched, allowing for precise introductions of up to four gases used for either etching or ashing with individual flow rates and purging. Pressure and flow as well as O2 and Ar levels can be monitored and adjusted immediately with the integrated flow controller. The Electrolyte Catalyst Module enables users to expand their reaction knowledge beyond just etching or ashing, to include such processes as film growth, electrolytic cleaning, and diffusion. 2300e4 Exelan Flex DX also includes an advanced precision sputter module, offering independent control of both target and power to ensure sputter uniformity. An integrated shutter closing mechanism, rotary chamber for easy sample handling, and quad turbo molecular pump are all featured on this tool. Together, these features combine for superior level of surface preparation to enable users to make any process more repeatable and reliable.