Used LAM RESEARCH 2300e4 Exelan Flex GX #293766466 for sale
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ID: 293766466
Vintage: 2018
Dielectric etcher
(4) 2300 Flex GX
2300e4 Platform
(4) Heated foreline manometer
(4) Chemraz vacuum valve
(4) NSR102216, RPDB for GX
(4) NSR102105, FLEX GX PM
Flex GX Quick clean kit
(4) 2300 Flex GX Jetstream gas box
3 Foup TDK
(4) Hermos carrier ID
WIDS Btm read
RGV/OHT PIO Sensor
Conditioning station (7 Wafer)
25 Slot aux buffer
VTM Pump: Edwards (EPX)
Vespel single sense
User interface: Side and front monitor
System UPS circuitry
Earth leakage breaker
Cable: TM-Subpanel, 100ft
Signal light tower, R-O-G-B Slim line
Light curtain
Input buffer corr res without Exh
Sys calibration and alignment
Service step for PM
VTM Robot lift
Robot CDM
Light tower buzzer
Metric to inch conv Fittings
APCS
NSR10702, N2 Flow monitoring on UP
Gas box:
(36) Jetstream gas line heated
(16) Gas line additional tuning
(4) Gas line non standard MFC
(9) NSR102690, Flex GX Gas line
(8) Flex GX Tuning Gas option
(1) Facility interface box
(17) Facility interface box
AFVi
2018 vintage.
LAM RESEARCH 2300e4 Exelan Flex GX is an advanced etcher/asher equipment designed for semiconductor manufacturing processes. This state-of-the-art tool offers a range of capabilities for etching and ashing applications, providing high precision and reliability in a production environment. The system combines innovative technology and user-friendly features to meet the demanding requirements of the semiconductor industry. 2300e4 Exelan Flex GX features a versatile platform that supports various etching and ashing processes, making it suitable for a wide range of applications in semiconductor fabrication. It is equipped with advanced plasma sources, gas delivery systems, and process control technologies that enable precise control over etching parameters such as selectivity, uniformity, and process rate. The unit offers flexibility in process development and optimization, allowing users to achieve optimal results for their specific applications. One of the key technologies integrated into LAM RESEARCH 2300e4 Exelan Flex GX is the Exelan Flex advanced control machine, which provides real-time monitoring and adjustment of process parameters. This tool offers superior process control capabilities, enabling users to achieve high process uniformity and repeatability across wafers. The Exelan Flex control asset also supports advanced process recipes and enables easy integration with other process tools for a seamless production workflow. 2300e4 Exelan Flex GX is designed for high productivity and throughput, with advanced automation features that reduce cycle times and increase operational efficiency. The model is equipped with a multi-chamber configuration that allows for parallel processing of multiple wafers, enabling high throughput and maximizing equipment utilization. The equipment also features fast chamber-to-chamber transfer times and efficient wafer handling mechanisms to minimize idle time and increase overall productivity. In addition, LAM RESEARCH 2300e4 Exelan Flex GX incorporates advanced process monitoring and diagnostics capabilities to ensure optimal performance and process stability. The system is equipped with in-situ metrology tools for real-time monitoring of key process parameters, enabling rapid detection of process deviations and adjustments to maintain process integrity. The unit also features advanced fault detection and prediction algorithms that help prevent process interruptions and minimize downtime. Overall, 2300e4 Exelan Flex GX is a cutting-edge etcher/asher machine that offers advanced capabilities for semiconductor manufacturing processes. With its innovative technology, user-friendly features, and high productivity, the tool is ideal for meeting the stringent demands of the semiconductor industry. Whether used for etching, ashing, or other process applications, LAM RESEARCH 2300e4 Exelan Flex GX delivers consistent, reliable performance for high-yield semiconductor production.
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