Used LAM RESEARCH 2300e4 Flex DX #293592612 for sale

LAM RESEARCH 2300e4 Flex DX
ID: 293592612
Wafer Size: 12"
Vintage: 2015
Oxide etcher, 12" 2015 vintage.
LAM RESEARCH 2300e4 Flex DX is an etcher/asher designed for use in semiconductor fabs. The equipment is a compact, high-performance etch/ash that is capable of handling a wide variety of applications. Its cleanroom-compatible design and high-speed process control make it an ideal choice for dielectric, polysilicon, and photoresist etching/ashing. The system also offers precise and repeatable results for etching/ashing applications. 2300e4 Flex DX is a multi-gas, multi-chamber etcher/asher unit that allows users to customize process parameters based on their specific requirements. It is compatible with a variety of materials, and is capable of etching/ashing processes that require high-power chambers and flexible parameter settings. The machine enables users to quickly and accurately adjust process variables such as chamber pressure, RF power, and reaction time. The 2300e4 also features an automated mapping tool that allows users to select and control multiple gas types and chamber residence times. The asset offers a high-performance platform that can achieve target etch rates in seconds, while consistently delivering repeatable results. This makes it an ideal choice for processes in which the thickness of the etch is critical and the process variation must be minimized. The 2300e4 also supports a wide range of process sizes and configurations, enabling users to scale the etch rate up or down as needed. LAM RESEARCH 2300e4 Flex DX offers an excellent combination of performance, flexibility, and safety. Its robust design, automated process control, and wide range of supported process configurations make it an ideal choice for users in the semiconductor industry. Its ability to quickly and accurately adjust process variables ensures that users can achieve precise, repeatable etch results.
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