Used LAM RESEARCH 2300e5 Exelan Flex EX #293751704 for sale

LAM RESEARCH 2300e5 Exelan Flex EX is an etcher/asher, designed for multiple processes, on various substrates. It is equipped with a large 2650 mm x 1950 mm processing area, allowing it to accommodate up to three full-size 300 mm wafers at a single time. The hardware has been designed to incorporate four process zones, Integrated Multiple Process (IMP) Mode, and 8 optional zone configurations. The 2300e5 is designed to provide advanced process control and Low Metallization Drift (LMD) capability, and has an optional in-chamber optical sensor that allows for greater process repeatability and uniformity. It is constructed with an automated delivery equipment for quick and easy substrate handling, and features an advanced safety interlock system to reduce risk of human contact with chamber components during operation. The 2300e5 is constructed with several features for a fast, efficient process. These features include real-time adjustments for RF, Gas and Temperature Control, a rapid thermal anneal (RTA) unit, and a large-size vacuum pump to facilitate quick evacuations. The machine is highly customizable, with an array of plasma sources, power supplies, and process recipes. The Exelan Flex EX also provides comprehensive monitoring and reporting capabilities, including real-time display of process variables, auto-calibration and automated gap and focus calibrations, an in-situ etch rate monitor, and an RTP program. Access to the 2300e5's built-in hardware, software and control can be via CCom and serial interfaces, or through an Ethernet-connected user interface. 2300e5 Exelan Flex EX is designed to provide users with an efficient and reliable etching and ashing process on multiple substrates using multiple processes. Its combination of advanced hardware and software makes it ideal for a variety of applications, from advanced semiconductor processing to industrial printing and coating. With the ability to process up to three full-size 300 mm wafers, and features such as process control, certain analytics and monitoring capabilities, rapid thermal annealing, and an automated delivery tool, LAM RESEARCH 2300e5 Exelan Flex EX is a versatile and powerful etcher/asher.