Used LAM RESEARCH 2300e5 Exelan Flex EX #293758911 for sale

LAM RESEARCH 2300e5 Exelan Flex EX is a next-generation etcher/asher for advanced semiconductor front-end device fabrication. This etcher/asher combines the market-leading Exelan single-wafer etching technology with a new multi-mode chamber design and several performance enhancements. This advanced etching platform features a large number of integrated process modules for improved flexibility, throughput, and yield. The Exelan Flex EX etcher/asher is equipped with broad process capability for a variety of etch and ash applications with wide process window. The system utilizes high-energy source and etch source in a single-wafer direct source configuration to provide superior etch uniformity and product quality. Its patented Active Asher technology delivers superior endpoint control during ash operations. Its advanced multi-mode chamber is designed to enable process flexibility and facilitate higher-volume throughput at low-cost per wafer. In addition, the Exelan Flex EX offers an intuitive proprietary control system to ensure ease-of-use and control accuracy during etching and ashing operations. This control system provides a full suite of process monitoring, control, and diagnostics features for comprehensive process management. It is also equipped with integrated hardware and software tools to enable rapid adaptation to varying process needs and applications. The Exelan Flex EX etcher/asher is the ideal choice for the advanced semiconductor production environments including the ultra-high density device fabrication. Its robust, scalable platform is designed to provide repeatable, reliable results, while also reducing cost and maintenance requirements. With its high-productivity, excellent process capabilities, and superior process control, 2300e5 Exelan Flex EX is the ideal choice for achieving optimized performance and yield in today's most advanced semiconductor device fabrication.