Used LAM RESEARCH 2300e5 Exelan Flex FX #293668506 for sale

LAM RESEARCH 2300e5 Exelan Flex FX
ID: 293668506
Dielectric etch.
LAM RESEARCH 2300e5 Exelan Flex FX (Chemical Mechanical Planarization) etcher / asher is a revolutionary etching tool used to etch complex features into a variety of materials. It is a multi-chamber etcher and asher equipment specifically designed for R&D and production applications. 2300e5 Exelan Flex FX utilizes a chemical-mechanical planarization process (CMP) to inscribe highly-accurate and consistently uniform features into any material, with no limitations on size or shape. The machine is equipped with a dual etching chamber that is capable of producing features of up to 0.075 microns thick with combination of series of ion bombardments and wet or dry chemical etches. The chambers can be set up for a single etching, two etching and single trim, or combined etch/trim operation. All of this can be done in-situ, without needing to switch resources. The machine also features a built-in wafer tracking system that enables the user to supervise the ongoing etching process, and audit trail for process and etch recipes. The software can even be set up to monitor the end-point of the process to ensure the wafer is correctly etched. The etcher / asher is designed with a safety interlock unit that eliminates any risk of wafer breakage or tampering without authorization. The tank and pump systems are isolated for each etchant, ensuring that there is no possibility of cross-contamination or accidental mix-up of different etchants. One of the most notable features of LAM RESEARCH 2300e5 Exelan Flex FX is its advanced automation capabilities. The entire process is managed by a control machine that enables integration with other manufacturing control systems and helps ensure repeatable results. The tool also comes equipped with an OPCUA communication protocol for connected to other local and remote machines. 2300e5 Exelan Flex FX is a versatile and reliable etcher / asher asset designed for production, research and development applications. The machine combines advanced precision features and automation capability, enabling it to etch complex features with high accuracy and repeatability. This offers manufacturers greater flexibility and cost-efficiency, enabling them to complete complex etching processes within short periods of time and with minimal waste.
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