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Etchers / Ashers
LAM RESEARCH
2300e5 Exelan Flex FX
#293754175
Used LAM RESEARCH 2300e5 Exelan Flex FX #293754175 for sale
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Etchers / Ashers
Manufacturer
LAM RESEARCH
Model
2300e5 Exelan Flex FX
Equipment Details
Reviews
ID:
293754175
Wafer Size:
12"
Vintage:
2014
Dielectric etcher, 12" Does not include Hard Disk Drive (HDD) Process: Oxide (4) Load ports Position 1,2,3,4,5: Gases: C4F6 COS O2 CH2F2 C4F8 Ar CHF3 H2 NF3 N2 CF4 Power supply: 200 AC, 3 Phase 2014 vintage.
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