Used LAM RESEARCH 2300e5 KIYO MCX #9252293 for sale
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LAM RESEARCH 2300e5 KIYO MCX is an etcher / asher equipment currently on the market for use in a wide variety of applications. It is a multi-chamber system, with four integrated process chambers, providing both etching and vacuum-assisted chemical cleaning. This unit has a very large chamber offering generous space for components and assemblies, allowing for processing of larger substrates and unique shapes. It can be loaded with one or more additional components, such as an integrated bubble wafer handler, for added convenience and productivity. The machine is based on a reliable DC-hollow cathode plasma source, providing improved uniformity and precise control over etch rates and selectivity. It can achieve uniform etch rate over a range of etch chemistries, and is designed for very fast etching of a wide range of materials. This etcher / asher also makes use of an adjustable purge control feature, allowing it to manage plasma "marble" and improve performance of carbon contamination removal processes. It has both DC and RF power supplies, enabling precise control over etch rates. The KIYO MCX is also capable of chemical cleaning utilizing a range of solutions. This is done either batch-style or inline in vacuum-assisted processes, which enables integrated cleaning and not requiring special setup steps compared to batch-style processes. Vacuum-assisted chemical cleaning can considerably improve cleaning quality compared to conventional batch-style cleaning. The tool is equipped with a control asset which provides advanced capabilities such as automatic real-time rapid-response process control, allowing for improved uniformity and better results. It also offers automatic recipe control to reduce variability of the process, and a large touch-screen LCD monitor for monitoring and manipulation of the etch and clean processes. In short, 2300e5 KIYO MCX is a reliable etcher / asher model that can be used to quickly and uniformly etch a wide variety of materials, using both DC and RF power supplies. It also provides efficient vacuum-assisted chemical cleaning capabilities, with advanced automatic process control. This makes the KIYO MCX a great choice for production environments requiring quick, consistent, and reliable results.
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