Used LAM RESEARCH 2300e6 Flex FX #293826568 for sale
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ID: 293826568
Wafer Size: 12"
Vintage: 2019
Etcher, 12"
(6) Flex FX Process chambers
(6) Gas boxes
Power box
Transfer chamber
2019 vintage.
LAM RESEARCH 2300e6 is a next-generation etcher/asher designed for precise process control and superior performance. This equipment provides the capability to etch and asher patterns with high accuracy, enabling precise pattern formation and reduction in pattern defects. The system has a reliable and easy to use design, high throughput and low particle contamination. 2300e6 offers a wide range of processing options, including high speed etch, low temperature etch, plasma deposition, and RF plasma etch. The unit features advanced instruments for precise sample handling and control, such as an auto loader, a wafer handling robot, a temperature controlled environment, and a particle detector. This machine also includes a computer-controlled integrated process control tool that monitors, optimizes, and controls each process step. It facilitates high precision control of etch times, pressures, temperatures and gases. The asset utilizes an improved technological infrastructure in the form of a high-frequency power supply, a temperature temperature controller, an air pressure monitor, and an IC load cell. It also has integrated diagnostics, allowing users to monitor and adjust process parameters to improve etching performance. Additionally, LAM RESEARCH 2300e6 is equipped with advanced high-speed imaging tools for non-destructive in-process inspection. 2300e6 is suitable for high-volume production of devices such as displays and semiconductor components, as well as for complex projects requiring precise etching down to the sub-micron level. This tool ensures greater control of the etching and ashing process, allowing for the highest possible yields in finished microcircuit devices. LAM RESEARCH 2300e6 is able to maintain accuracy to within 1 nanometer and provides an excellent resolution of 200 angstroms. As a result of these advanced technologies, 2300e6 provides exceptionally reliable performance in various process areas. It is an excellent choice for manufacturers who require precise and repeatable etching results. This model is suitable for a wide range of etching and ashing processes, and is designed to handle high volume production with tight control of the etching and ashing process.
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