Used LAM RESEARCH 2300e6 Kiyo EX #293631692 for sale

LAM RESEARCH 2300e6 Kiyo EX is an advanced etcher / asher equipment built for advanced copper for-metal alumina patterning for manufacturability. This system is designed with a mechanical alignment unit which makes advanced processing with advanced patterning capabilities possible. It offers a wide range of safe process options such as chemical passivation, metal etching and advanced cleaning. The machine also includes several advanced process control tools such as variable substrate bias control and advanced RF control. It utilizes a high power RF generator that offers a low to several tens of kHz tunable range and a wide sweep frequency range. It has four independent gas sources which allow the user to choose from a variety of deposition gases. Additionally, it has four dual chain RF coils, a PID temperature sensor and a closed loop RF amplitude and power control. The etcher / asher tool features an 8-inch electrode for higher resolution and uniformity, with an optional 10-inch 9-inch and 11-inch option. It has up to three independent gas sources, a designed with an aluminum body and advanced positioning asset for greater reliability. Furthermore, the unit is also equipped with pressure and temperature sensors, and a self monitor to support cleanroom operation. It has a liquid delivery unit, a vacuum chamber cleaning unit and coolant analysis model. 2300e6 Kiyo EX equipment is designed to be used for the most advanced application development in semiconductor manufacturing. Its features include low power usage, high-end substrate holder and advanced RF system. The unit allows users to pattern advanced structures efficiently and accurately. Its wide range of process options and independent gas sources make it a great choice for advanced metal alumina patterning applications.