Used LAM RESEARCH 2300e6 #9218169 for sale
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LAM RESEARCH 2300e6 is a high-performance, cost-effective etching and ashing equipment. It is designed to provide a wide range of etching/ashing capabilities, from reactive ion etch (RIE) to chemical vapor deposition (CVD) and all other etching and ashing technologies. This system's configurable modular architecture allows users to customize their tool to meet the precise processing requirements of their applications. Additionally, 2300e6 offers a high-speed, low-cost etching/ashing solution which is fast, efficient, and reliable in the lithography environment. The unit comes with a range of process tools, including deposition tools like ion etch (IE), electron cyclotron resonance etch (ECR) chambers, as well as hydrogen and oxygen plasma etch chambers. It also features a fully automated batch process controller, providing complete parallel subsystem control. This allows operators to configure multiple process parameters simultaneously, and to quickly modify these parameters as needed to achieve the desired etching/ashing parameters. LAM RESEARCH 2300e6 provides a range of etching/ashing recipes, enabling users to custom-tailor their process recipes. Additionally, the machine includes a wide range of diagnostic tools to enable users to control the etching/ashing process. These tools include spectral emissions analysis, thermocouple measurements, thickness measurement, film scanning electron microscopy, and more. 2300e6 etching/ashing tool is designed for high throughput and cost-effectiveness. Thanks to its fast cycle times, and modular architecture allowing users to modify process recipes, the asset is an ideal choice for commercial, general, and advanced etching/ashing applications. Its high-performance features and process reliability also make it well suited to prototyping, process development, and research applications. In addition to its process capabilities, LAM RESEARCH 2300e6 is equipped with an integrated front end interface software which provides complete user control over all operations. This allows users to easily setup their etching and ashing recipes, modify the parameters for multiple steps of the recipe, and monitor the process. The software also provides an intuitive, graphical interface to streamline the operation of the model. Overall, 2300e6 is a highly capable, cost-effective etcher/asher with a range of advanced process capabilities and intuitive user interface software. Thanks to its fast cycle times and ability to modify recipes, this equipment is ideal for many etching and ashing applications.
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