Used LAM RESEARCH 2600 E6 Flex FXP #293649521 for sale

LAM RESEARCH 2600 E6 Flex FXP is a fully automated etcher/asher designed specifically for the production of advanced semiconductor materials. The equipment is equipped with advanced process control features to ensure precise, repeatable processes. The capabilities of 2600 E6 Flex FXP's are unmatched in the development of advanced semiconductor materials. LAM RESEARCH 2600 E6 Flex FXP Etcher/Asher has the highest level of substrate reproducibility throughout the etching and ashing process. At the core of the system is a wafer transport mechanism that provides a superior level of reproducible substrate movement and alignment throughout the etching and ashing process. This unit enables precise, repeatable dimensional control and process consistency. The machine is designed for ultra-high resolution plasma etch and asher applications on both planar surfaces or deep trenches and sidewall approaches. 2600 E6 Flex FXP also offers high concentration ion source and high pressure glow discharge for etching, combined with high quality plasma ashing for highest process performance. The intense plasma gives the flexibility to process a range of wafer types for a variety of applications. The tool also utilizes multiple plasma sources to enable high etch rates and a wide process window. For optimal process control, LAM RESEARCH 2600 E6 Flex FXP also provides a comprehensive range of advanced process control feedback and control features, including end-point control and real-time temperature/pressure feedback. 2600 E6 Flex FXP is an essential tool for any advanced semiconductor materials manufacturing environment, providing repeatable and reproducible processes and high levels of process control. The combination of superior substrate etching/ashing performance, advanced process control feedback and exceptional process accuracy makes LAM RESEARCH 2600 E6 Flex FXP a must-have tool for advanced semiconductor production.