Used LAM RESEARCH 4000 Series #9169567 for sale

LAM RESEARCH 4000 Series Etcher / Asher is a sophisticated, high-frequency, automated plasma etching equipment, designed for both production and research and development. It offers an intuitive user interface which provides chemical-free etching for most dielectric and metal films. The system uses LAM RESEARCH patented X-Cs Technology to provide advanced etching precision and control over process parameters. 4000 Series features an advanced axial-type sequential plasma source. This source ensures that the highest quality etching results are achieved in the shortest amount of time, while the advanced chucking mechanism secures the wafer under vacuum conditions, providing a stable processing platform. The unit's integrated plasma control subsystem accurately manages all process parameters, ensuring consistent etching quality across wafers. Its control software allows users to easily program and store recipes for future use. In addition to excellent etching capabilities, LAM RESEARCH 4000 Series features excellent power and airflow management. This ensures consistent etching speeds and stability, while maximizing the machine's total performance. 4000 Series is equipped with LAM RESEARCH proven sensor technology which provides feedback control of the etch chamber, improving chamber repeatability and maintaining long-term chamber performance. Its advanced vacuum control tool provides stable vacuum performance and enhances contamination control. With its ability to etch a wide range of materials, high-quality results, and intuitive user interface, LAM RESEARCH 4000 Series Etcher / Asher is the ideal solution for high-precision etching requirements in production and research and development.