Used LAM RESEARCH 4420 XL #9399006 for sale

LAM RESEARCH 4420 XL etcher/asher is a low-cost solution for many etching and ashing needs. This equipment is widely used in the semiconductor and MEMS industries for etching and ashing processes. It is capable of processing up to 6 inch (150 mm) wafers with a maximum pressure of 100 Torr. The etching speed and accuracy are also quite impressive for a low-cost system as it can etch and as at high speeds of 300 mm/min with a normalized endpointing accuracy of ± 0.003 inch (0.08mm) per wafer. LAM RESEARCH 4420XL is a modular unit, meaning it can be tailored to suit users' specific needs by selecting specific parts such as gas sources, gas delivery systems, and chambers. The machine is capable of etching and ashing with a wide range of gases including SF6, CF4, O2, CF4/O2, Ar, and HBr. It also features several advanced etching technologies such as RIE, magnetron, and OBIRCH, allowing users to tailor the tool to their specific process needs. 4420 XL also includes a range of advanced process control tools, including Autotuning and Substrate Matching, which help to ensure that process recipes are optimized. The asset also includes two diagnostic tools that allow users to monitor the etch and ash process, including an end-point detector and an in-situ gas analyzer. 4420XL also has many safety features, including an RF interlock model which prevents wafers from being processed if certain conditions are not met. Furthermore, the equipment features an Emergency Stop button and a built-in Vacuum Power Control module, which helps to ensure that no process is carried out unless the system is ready and safe. Overall, LAM RESEARCH 4420 XL is an excellent etcher/asher unit and is a reliable and affordable option for many etching and ashing needs.