Used LAM RESEARCH 4420 #9198093 for sale

LAM RESEARCH 4420 Asher/Etcher is a high-performance dry etching system, designed to provide optimal repeatability, process control, and throughput. It is equipped with advanced features, including high-speed thermal control, etch rate control, and in-situ cleaning capability. It also offers the flexibility of automated operation and process flexibility for multiple applications. 4420 is capable of processing a wide range of substrates, from glass, polyimide, and semiconductor wafers etc. It is equipped with an advanced quartz etch tube which provides superior temperature, pressure, and uniform flow control. The advanced etch mechanisms such as dual-plasma mode, variable frequency power control and long pulse duration for deep etch, allow for greater process capabilities than single-stage etching. The multi-chamber design of LAM RESEARCH 4420 enables both anisotropic and isotropic etching. The anisotropic etch mode utilizes a three-step etch process with a superior etch rate control. It also features an optimized chamber design to ensure consistent etch performance. 4420 also features an automated purge system with CFC-free fluid, designed to ensure high repeatability, process control, and throughput. It is equipped with an effective vacuum system with uniform throughout the process chamber. In addition, LAM RESEARCH 4420 is supported by software that allows for data acquisition, remote diagnostics, and programming of recipes for multiple applications. It also has a full suite of sensors and diagnostics that allow for optimal process control and quality assurance. Overall, 4420 is a powerful, cost-effective etcher/asher with advanced features that ensures uniformity, repeatability, and process control. It also enables rapid process flexibility for a variety of applications, with an easy-to-use interface and comprehensive customer support offering.