Used LAM RESEARCH 4500 #9226135 for sale

LAM RESEARCH 4500
Manufacturer
LAM RESEARCH
Model
4500
ID: 9226135
Wafer Size: 5"
Vintage: 1995
Etcher, 5" 1995 vintage.
LAM RESEARCH 4500 is an advanced etcher / asher designed for a number of applications. It is suitable for both dry and wet etching in lithography, photoresist removal and copper striping applications. The equipment includes a separate load/unload chamber and is capable of accommodating an array of wafers, up to 8" in diameter, for etch or asher processing. 4500 is constructed from stainless steel, enabling it to better resist corrosion from a variety of chemicals and to tolerate the higher temperatures encountered in etch or asher processes. The two primary components of LAM RESEARCH 4500 are the tank and the platen. The tank is a sealed chamber, controlled by a touch-screen. The platen is a flat surface that the wafer is placed to keep the wafer from being exposed to the etching or stripping medium. 4500 is equipped with multiple features to provide a safe and efficient etching process. It is equipped with automatic temperature control to regulate the etching temperature and reduce the time needed to find an optimal etching condition. Additionally, it has nitrogen purge and ozone reduction mechanisms to inhibit the formation of ozone and nitrogen oxides during the etching process. The system is also equipped with safety features to protect the operator and the environment. It has an automatic shutdown unit to protect the operator in case of mechanical or electrical failure. The machine is also designed with shielding to protect people from radiation emitted during the plasma etch process. LAM RESEARCH 4500 is a highly versatile etcher/asher tool because it enables the use of a number of processes and media to perform etching or ashing. It is suitable for etching a variety of substrates, such as metals, ceramics, and semiconductor materials, with etchant or ash media like gases and liquids. The asset can also be used to etch with a plasma or an ion-beam. 4500 is designed for cost-efficient, precise and precise etching or ashing process. It is a great tool for both wet and dry etching and stripping of Copper, Aluminum and a variety of other materials. Its advanced features and safety measures make it the ideal etching model for the industry and laboratory alike.
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