Used LAM RESEARCH 4500 #9293553 for sale
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ID: 9293553
Oxide etcher, 6"
ESC
Missing parts:
Throttle valve
Hard Disk Drive (HDD)
Gap motor.
LAM RESEARCH 4500 is a high performance etcher/asher designed for cost-effective semiconductor processing. This cost-effective solution for advanced etch and ash operations provides the highest reliability and throughput for the most demanding process applications. The equipment is designed to provide the best balance of low cost and high performance, while also allowing for scalability as technology advances. 4500 consists of a mainframe, a motorized gas box, and a wide variety of options to suit different customer needs. The mainframe is equipped with a powerful, two-stage etch chamber, enabling the etch processes to achieve the desired depth and uniformity on complex surfaces. The motorized gas box is equipped with individual mass flow controllers, allowing the etching process to be finely tuned each time the system is used. The LAM LAM RESEARCH 4500 is constructed with a variety of advanced components, including a motor-drive gas box, high precision resistive heating, and electrostatic chuck (ECC) technologies. The ECC unit helps ensure that wafer sheets are clamped continuously during etching, helping to reduce risk of sample damage and improve overall production. Additionally, the low-presence chamber design helps reduce potential sample contamination, by removing contaminants from the processing space before etching. 4500 also includes a vacuum machine and a control box, both of which are essential for properly operating the tool. The vacuum asset ensures that the wafers are held securely, while the control box allows the user to control the model using a number of parameter settings. A variety of additional features are available to enhance LAM RESEARCH 4500's performance, including optional gas box inlet shutters, an adjustable mounting base, and a mass spectrometer for monitoring real-time process information. 4500 offers the best overall value for both cost and performance for advanced etch and ash operations. Its low-cost design supports rapid development, while its flexible design enables it to be configured for complex processes. The equipment's advanced componentry also ensure a reliable, high-throughput system. For these reasons, LAM RESEARCH 4500 is an ideal choice for customers seeking a high performance, cost-effective etch/ash unit.
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