Used LAM RESEARCH 4500 #9298520 for sale

LAM RESEARCH 4500
Manufacturer
LAM RESEARCH
Model
4500
ID: 9298520
Etcher.
LAM RESEARCH 4500 is an advanced plasma-etching equipment from LAM RESEARCH Corporation. It is a technologically advanced, high speed etching system that is used for trench etching, fine patterning, gate etching, high aspect ratio etching, and other advanced etching processes. The unit uses innovative technologies that are tailored to the specific needs of the application. Its features include high productivity, flexibility, reliability, and ease of use. The machine features an advanced etch chamber that supports a wide variety of substrates and materials. It has an optimized process uniformity and provides excellent wafer quality. The chamber is designed to provide a versatile, adjustable platform that can accommodate both high and low temperature etching processes. The chamber also supports a variety of gases such as O2, CO2, N2, and Cl2, making it ideal for a wide range of materials. The tool is equipped with a number of advanced technologies that optimize etching performance and throughput. It uses a high-performance electron cyclotron resonance (ECR) ion source and ion beam focusing to control etch profiles, sidewall angles, and line widths. It also features integrated in-situ process monitoring, automatic process tuning and control, and direct sampling for accurate fault detection and process optimization. The asset is powered by an integrated Windows-based controller and is capable of connecting to an industrial automation model. It is supported by a comprehensive documentation package and real-time feedback from process and environmental monitors. The comprehensive user's manual includes installation, maintenance, and service instructions, as well as instructions for operation, results analysis, and troubleshooting. 4500 is designed to deliver superior performance in the most demanding etching applications. It is an ideal tool for producing the highest possible product yields with the most cost effective resources. For those looking for a high performance etching equipment, LAM RESEARCH 4500 offers unmatched performance and excellent results.
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