Used LAM RESEARCH 4500 #9311439 for sale

LAM RESEARCH 4500 etch/ash equipment is a fully automated, ultra-high accuracy etch/ash system that is capable of producing high quality wafers with a single process step and line-of-sight wafer tracking. The unit is designed to provide remarkable flexibility, enabling up to four processing steps to be completed within a single process. The machine has two workstations that each contain an etched ferromagnetic material source (EFMS) and an electro-optical chamber which contain a high intra-axial platen that performs a variety of processing operations, including chemical vapor deposition (CVD) and atomic layer deposition (ALD). It supports recipe-based wafer processing, including standard, high-density and hierarchical technology, with temperatures up to 30°F. The tool also has an end-effector with a chemical dispenser and a fast-acting control knob that enables quick and precise control of etching time, temperature, and pressure. 4500 etch/ash asset utilizes a unique combination of the single-processor, micro-scale etch tools, and double-sided, optically controlled wafer handling to offer superior accuracy and repeatability. The model also features fast wafer-to-wafer transfer speeds and a flexible front-end platform that allow for efficient and accurate processing. The high accuracy of this equipment is a result of its focus on dimensional stability, leveling uniformity, thermal management, sensor accuracy, and process control. This system is ideal for etching/ashing processes that require excellent consistency and repeatability for both repeatable and specialized processes. It is capable of producing high-quality, high-precision wafer products with single-process repeatability and is the preferred unit for applications requiring high accuracy and monitoring.