Used LAM RESEARCH 4500iB #9250093 for sale

LAM RESEARCH 4500iB is a high-end etcher/asher equipment, designed for high precision etching of small, precise geometrical features such as contact windows for integrated circuits. The system is equipped with a variety of automated controls and options for the etching process. The unit integrates a horizontal reactor stage with a single wafer heater, and advanced control electronics and motion control software. The machine is designed for thin and thick film techniques, and can be configured for complex aspect ratios. The tool supports both front side and back side etching techniques using a wide range of etch chemistries, including CF4, Oxygen, Argon, CHF3, and Hydrogen Fluoride. The asset features a small footprint and lightweight design, allowing it to be easily integrated into existing fabrication lines. The model's high precision motion control equipment is capable of controlling both linear and rotational movements with up to 0.1 µm resolution and up to 1000 steps per second. The system is capable of providing clean, oxides free surfaces with etch depths up to 1µm. For automated features, the unit features an automated end point detection machine, which monitors the etching progress and stops the etching process at pre-determined etch depths or other process conditions. 4500iB also features an advanced process monitoring package, which consists of numerous sensors to monitor process parameters such as pressure, temperature, voltage, and power. This data can be recorded for immediate or post-process inspection. The tool also includes an automated Zero-Point Switch off feature. This feature ensures that the etching process stops automatically if there is a break in the electrical connection. This ensures that the etching process does not continue indefinitely, preventing thermal damage to the wafer. The asset is also equipped with an automated wafer loading/unloading model to facilitate quick and easy wafer exchange. Finally, the equipment features an intuitive graphical user interface, allowing for easy process parameter editing and monitoring. This allows for faster setup and changeover times, reducing the need for operator intervention. In conclusion, LAM RESEARCH 4500iB is a powerful etcher/asher system, suitable for high precision and automated etching of small geometrical features.