Used LAM RESEARCH 4520 XL #9374770 for sale

LAM RESEARCH 4520 XL is an etch/ash equipment which is used for advanced dielectric etching and superficial-level wafer cleaning. It is designed to perform high-precision etching and cleaning processes with unparalleled accuracy, speed and repeatability. This system is equipped with dual friction-drive vertical linear stages to ensure high-accuracy and consistent alignment of wafers during processing. The etcher/asher is equipped with an optical unit which provides reliable process data analysis and control. Additionally, LAM RESEARCH 4520XL is capable of processing multiple wafers simultaneously, making it perfect for high-volume production applications. The etcher/asher is equipped with a hydrogen-based plasma generator and is capable of performing oxygen-based etching or ash operations. The generator is fitted with an Electrostatic Chuck (ESC) which can hold and accurately position the wafers and ensure uniform etch quality. In addition, the generator also features Enhanced Dielectric Etching (EDE) which provides highly precise etching capabilities. Furthermore, the generator is fitted with a Substrate Radial Delivery Station (SRDS) to ensure optimal and consistent wafer handling. The wafers can process through the machine at a maximum speed of 30 wafers per hour and are subjected to a continuously monitored quartz temperature, ensuring high-quality results. 4520 XL is designed to deliver superior performance for the most specific process demands. It features onboard, intelligent process control with a total process sequence creation capability. It is also equipped with unparalleled diagnostic capabilities, allowing users to maximize their tool performance. This etcher/asher can also be easily integrated with batch-process management systems as well as process queues. The asset is also equipped with comprehensive recipe creation and management tools to help users create and manage recipes in a per-wafer or per-lot fashion. 4520XL is a dependable, accurate and reliable etch/ash model, capable of delivering the highest-quality results while providing optimum efficiency at a very competitive price. It is ideal for high-precision as well as high-volume production applications in a variety of industries such as semiconductor, solar and hard disk drive manufacturing.