Used LAM RESEARCH 4520 XLE #293825710 for sale

LAM RESEARCH 4520 XLE is an etcher / asher designed for optimal performance in a variety of semiconductor etching and ashing applications. The unit supports a wide range of substrates and is compatible with many of the existing chemistries and tool options in the industry. 4520 XLE equipment is designed for rapid throughput, with a typical cycle time between two and five minutes, allowing it to process up to 500 wafers per hour. The system is capable of running with a wide range of gases, such as CF4, SF6, NF3, O2 and other chemistries. LAM RESEARCH 4520 XLE is constructed from robust components to ensure steady performance throughout its lifetime. It utilizes a horizontally mounted electro-polished stainless steel chamber and quartz showerheads for superior etch uniformity. The etcher is connected to a central control panel which allows for the configuration and control of the etching and ashing parameters, including temperature, pressure, gas flow, and wafer bias. The unit also includes safety features like chamber temperature and pressure sensors, gas shut-off valves, and an interlocks machine. 4520 XLE features a fast cleanup and wafer loading station, which is designed to minimize downtime and make solutions changes fast and easy. The chamber can be quickly evacuated and the tool is capable of being maintained with minimal downtime due to its automatic asset diagnostics and troubleshooting processes. The model is designed to generate minimal contamination, making it a great choice for critical etching and ashing applications. LAM RESEARCH 4520 XLE is a versatile and reliable equipment, perfect for industrial and research applications alike. It boasts superior performance, robust construction, and a fast and easy maintenance process. The unit is built to be reliable and efficient, providing a steady and stable platform for optimal etching and ashing results.