Used LAM RESEARCH 4520 XLE #9172983 for sale

LAM RESEARCH 4520 XLE
ID: 9172983
Assembly lifter blws seals P / N: 853-031764-002.
LAM RESEARCH 4520 XLE is an extremely reliable asher/etching equipment. This system is perfect for applications such as semiconductor fabrication, medical device components, automotive sensors, and optical components. 4520 XLE offers both flexibility and the ability to cover multiple process areas. LAM RESEARCH 4520 XLE provides a user-friendly experience with its low-profile, open architecture design that enables single-wafer, medium-size batch, and large area process recipes. The unit features a multi-chamber operation, which allows users to actively switch between ashing, in-situ metrology, and other processes. The machine also features an easy-to-configure electrical simulator platform, which makes it highly efficient and accurate. 4520 XLE offers superior productivity with an inline wet-etching process and the ability to handle up to 8 wafers per cassette for batch processing. The tool is capable of reaching 100% utilization rates with its unique integrated scan-aligner asset, which enables it to continuously monitor and clean the etching surface. The model also includes a pre-planned chamber component layout that ensures easy chamber access. LAM RESEARCH 4520 XLE is highly reliable and provides a long-term operational life with its PVD-deposited ceramic coating. This coating is corrosion-resistant and will not be affected by long exposure to harsh chemicals. Additionally, the equipment has an automated wafer load lock and chiller airtight piercing system that reduces the risk of chamber refusal due to accidental inclusion. Moreover, 4520 XLE has an integrated diagnostics unit that provides real-time performance analysis and process fault analysis. Additionally, the machine features a modular design and powerful analytics suite, which allows users to configure and monitor the tool performance and process trends. The integrated analytics platform provides a complete range of process and equipment data in real time. In conclusion, LAM RESEARCH 4520 XLE is a highly reliable asher/etching asset that offers superior process flexibility and productivity. The model features a modular design, advanced diagnostics, and a powerful analytics platform, which allows users to accurately and effectively monitor and configure the equipment. This system is perfect for various applications, including semiconductor fabrication, medical device components, automotive sensors, and optical components.
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