Used LAM RESEARCH 4520 #199859 for sale
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ID: 199859
Wafer Size: 8"
TCP oxide etch system, 8"
Can be converted to 6"
Mounting: bulkhead
Software: Envision 1.52
Indexers: HINE
AC box: -002
Gas box: orbital welded
Clamping: ESC
Backside helium: close loop
Generator: PDW 2200
RF match: LOFAT
Endpoint: monochrometer
MFCs: Unit 1660
Gas config:
Gas 1: Ar 1000
Gas 2: N2 200
Gas 3: O2 200
Gas 4: CH4 200
Gas 5: CHF3 50
Gas 6: SF6 50
Gas 7: O2 1000.
LAM RESEARCH 4520 etcher / asher is an advanced, fully automated and digitally controlled plasma etcher/ asher used for a variety of semiconductors and microelectronic materials. This machine offers several unique features to enhance user productivity, accuracy, and precision. 4520 is constructed from strong and durable materials that enhance its long-term use. The machine components are easily accessible and interchangeable so maintenance and repair can be achieved with minimal downtime. The digital control panel allows for efficient and precise control of processing parameters. The high levels of processing accuracy and repeatability provided by LAM RESEARCH 4520 etcher / asher further enable the manufacture of better and higher quality devices. The digital control panel also features distinct keys and encoders that enable the operator to instantly adjust the etching duration, pressure, and composition. The machine has two independeant chambers to accommodate double wafer processing in a single operation. The device is capable of using a variety of etching gases and process fluids for chemical and physical etching of thick film and thin film substrates. It can be used to modify and etch a variety of materials, including silicon, gallium arsenide and other semiconductor materials. 4520 is equipped with advanced safety features to protect operators and product from hazardous conditions. The safety provisions built in to the machine include gas explosion monitoring, pressure safety interlocks, and emergency shut-off buttons. Furthermore, by using a fully sealed system, any hazardous material or vacuum being used is contained. The machine is extremely versatile and its modular construction allows users to configure the system to meet their process needs. In addition, LAM RESEARCH 4520 etcher / asher has been designed to meet international safety regulation standards. This ensures users they are operating their machine in a safe, reliable and compliant manner. To conclude, 4520 etcher / asher is the ideal choice for the manufacture of semiconductor devices and microelectronics. With its advanced safety features, accurate and precise digital control panel, and easy maintenance and repair, this machine provides users with the ultimate tool for high productivity.
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