Used LAM RESEARCH 4520 #293595659 for sale

LAM RESEARCH 4520 is an etcher/asher composed of single wafer, low pressure, plasma activation that is capable of etching or ashing a range of materials, including dielectrics, polyimide, glass, metal, and silicon. It is a compact equipment with a 6 inch wafer size capacity, providing a high level of accuracy, repeatability and process flexibility to reduce costly and time-consuming changes to equipment. The system features a low pressure, plasma activation process, and is designed to reduce surface contamination and provide a high quality, anisotropic etch rate and depth uniformity. 4520 is also an energy efficient unit and is equipped with a closed-loop process control machine to ensure full uniformity and control of the etch process. Additionally, it includes a high power microwave source for high performance etch/ash cycles and/or plasma treatments. The exclusive DART (Dynamic Etch Rate Control) technology included with the tool is designed to monitor and control the rate at which the etch proceeds, stabilizing plasma and uniformity through the etch process. This ensures the highest quality part is created regardless the process requirement. Additionally, the CPV (Closed-loop Process Validation) feature allows quick and easy adoption of new recipes, faster capital payback and overall process optimizations. The asset is capable of handling a variety of wafer types as well as a range of materials, allowing for different etch and ashing grades. The user-friendly GUI allows for customized etch/ash recipes specific to the customer's application requirements. The etcher/asher can be used in either a batch or continuous mode. LAM RESEARCH 4520 is backed by superior communications and support services at a competitive price, ensuring the highest level of customer satisfaction.