Used LAM RESEARCH 4520 #9029521 for sale

LAM RESEARCH 4520 is a state-of-the-art etcher and asher. It is part of a series of advanced etch and ash tools that provides manufacturers with precise control over their processes. 4520 is a dry, positive-etching equipment, which means that material is removed by a gas-driven plasma source. It is capable of producing precise features with high accuracy, on wide range of materials, with precise control of features, depth and surface finish. LAM RESEARCH 4520 has a modular design which allows for great flexibility in the process. It can be configured for a wide range of etching and ashing applications, including chemical/mechanical polishing (CMP), masking/unmasking, microstructuring and rapid thermal processing (RTP). It also has the capability to process a variety of substrate shapes and sizes, allowing for process uniformity in the production of complex devices. 4520 features an integrated process control system which allows for precise control of all factors, including the time, temperature and pressure of the process. This makes it possible to achieve high levels of quality in the production process and helps to reduce defects. The unit also features a multi-zone He-Ne laser interferometer, which allows for precise measurement of substrate locations. LAM RESEARCH 4520 also includes advanced safety features, such as a failsafe machine to stop the process if necessary. The tool also includes a variety of diagnostic capabilities, including real-time imaging, to check process parameters and zones. This helps to ensure the uniformity and repeatability of the processes. In conclusion, 4520 is an advanced etcher and asher which provides manufacturers with precise control of their etch and ash processes. Its modular design and advanced process control asset allow for great flexibility to produce complex and high-quality devices. It also features diagnostic capabilities and safety features to ensure consistent quality in the production process.