Used LAM RESEARCH 4520 #9145859 for sale

LAM RESEARCH 4520 etcher/asher is an advanced piece of processing equipment suitable for industrial use. It is capable of etching, planarization, and ashing with a range of materials in a single process chamber, allowing for increased production throughput and greater process flexibility. 4520 has a capacity of 24 400mm wafer carriers, and is equipped with both chemical and dry processing capabilities. For chemical processing, users can choose from a variety of liquids including IPA, KOH and TMAH, and for dry processing LAM RESEARCH 4520 can be used with N2 and O2. 4520 is built with a Modular Control Equipment (MCS) which allows users to control process parameters from a computer. This allows for advanced process optimization and reduces the need for manual intervention. LAM RESEARCH 4520 also features advanced safety features designed to protect personnel. It features a Pressure Limited Chamber (PLC) system which prevents an overpressure situation in the chamber and a Thermal Break Unit which prevents heat buildup in the chamber and reduces the risk of fire. 4520 also features an automatic Leak Detection Machine which is designed to detect any leaks in the tool before they get out of hand. In terms of performance, LAM RESEARCH 4520 is capable of a wide range of etching rates and repeatability of within ±5% over 20 consecutive wafers. It is suitable for both low-volume and high-volume production and can be used to process wafers with a diameter range of 100mm to 200mm. It also boasts a long mean time between failure (MTBF) rate, which makes it ideal for continuous, uninterrupted operation. Overall, 4520 etcher/asher is a high-performance, industrial-grade piece of processing equipment capable of etching, planarization, and ashing a range of materials. Its capabilities make it suitable for high-volume production and its advanced safety features ensure personnel safety.