Used LAM RESEARCH 4520 #9386644 for sale

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Manufacturer
LAM RESEARCH
Model
4520
ID: 9386644
Wafer Size: 8"
Oxide etcher, 8" Bottom clamp type.
LAM RESEARCH 4520 is an advanced etching and asher equipment designed to deliver precise, high-volume results in the most efficient manner. The system is equipped with a powerful plasma source that helps to processes materials rapidly without any compromise in accuracy. The unit is designed to handle a variety of materials, including hard metal and non-metal, providing the versatility that is expected of a modern etching and ashing machine. The designs and tooling of the tool are capable of producing precise results regardless of material and the use of advanced imaging techniques, including short wavelength and deep ultraviolet photolithography, enables precise patterning. The LAM 4520 includes an automatic process control asset and advanced pattern recognition software which permits processing of even the most complex designs with ease. Additionally, it is equipped with a remote process controller that enables adjustments to the process in real time without interrupting the overall operation. This makes the model highly effective and efficient and ensures that even the most intricate of designs can be processed with precision. The equipment is built to deliver exceptional yields and quality. Its best-in-class vacuum system and a highly effective ion-sputtering source - capable of processing substrates at considerably higher rates - provide fast process times and superior performance. Furthermore, its advanced lithography-enhancing tool allows for better precision and yields excellent results. LAM RESEARCH 4520 is an efficient, powerful and highly reliable etching and ashing unit, capable of delivering superior performance in high-volume applications. Its wide range of customization options, advanced feature set and improved process control makes it an ideal choice for industrial and academic research laboratories.
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