Used LAM RESEARCH 4520 #9401524 for sale

LAM RESEARCH 4520 is a high-performance etcher / asher. It is a single-wafer Vertical Reactive Ion Etcher and Asher (VRIEA) system designed for production. This system utilizes a specialized combination of power sources and chemistries to create consistent and repeatable processes that provide high-precision etching and ashing results. 4520 is capable of a wide range of different processes. It features a clean and thick dry etch process, an optionally integrated asher, and it has thermal capability. It also features an advanced interface for recipe setup, data collection and management and system diagnostics. This allows for a wide range of process flexibility and custom configurations. LAM RESEARCH 4520 is designed for a wide range of chip sizes. It is compatible with wafers from 1 - 6 inches and is capable of achieving thickness from NMOS, PMOS or oxide-type materials. It features a narrow, uniform etch that minimizes critical dimensions, and it has an accuracy of +/- 0.25 microns. 4520 utilizes plasma power sources and chemistries to achieve the desired etching and ashing processes. Its gas mixtures are tailored to each process and can be configured in many combinations. Its high-frequency variable-power generator ensures a uniform and consistent process. LAM RESEARCH 4520 also includes an advanced software application to help manage the etching and ashing process. This software can help create sequential steps in an etching recipe, gather production data and review process parameters. It can also aid in troubleshooting and automating the etching process. The versatile 4520 is designed for the production of today's smallest and most challenging products. Its integrated software and advanced processes make it perfect for high-precision etching and ashing. It can provide the repeatability and uniformity needed to ensure the best possible results.