Used LAM RESEARCH 4520B #9278088 for sale

LAM RESEARCH 4520B Etcher / Asher is a high performance, 3 chambers, in-line asher / etcher for semiconductor device fabrication. 4520B has a unique independent slide loadlock which provides flexibility on individual chamber use, temperature, pressure and recipe development. The etcher/asher is fully configured with safety systems and has built-in self-diagnostics capabilities. It is designed to deliver reliable high-yield devices with smooth uniform processing capability. LAM RESEARCH 4520B Etcher / Asher has a compact planar design which accommodates up to three processing chambers simultaneously with minimal footprint and easily provided communication interface. The etcher / asher features active uniformity control technology, a proprietary plasma source, and advanced gas delivery equipment. The three processing chambers of 4520B, an asher, a constant temperature or programmable temperature etcher, and interchangeable wetclean, enable users to optimize different parameters, such as material to be etched, temperature and pressure, plasma power, and etch uniformity to achieve optimal throughput and yield. LAM RESEARCH 4520B Etcher / Asher has precise recordable recipe control which allows users to quickly and easily replicate precise processes. It has Built-in support for both chamber-level and recipe-level quality control, with real-time chamber diagnostic system for recipe optimization and chamber performance. In addition, it offers a wide range of process parameters including temperature, pressure and gas flow and provides precise control over the individual chambers. Moreover, 4520B is equipped with efficient safety features, including gas containment, shut-off in chamber, automated pressure control unit, and lighting machine. It also provides a hands-free end-point detection, convenient resource sharing, and users can monitor all the available process parameters in real-time, including wafer to wafer repeatability. Overall, LAM RESEARCH 4520B Etcher / Asher is an ideal solution for all of semiconductor device fabrication. It is equipped with efficient safety features and provides precise control, allowing for precise recipe execution for uniform device processing.