Used LAM RESEARCH 4520i #9130287 for sale

LAM RESEARCH 4520i is an etcher/asher designed to provide an ultra-high aspect ratio etch process. This etcher/asher is a compact, high-temperature equipment that is suitable for a wide range of applications, such as semiconductor die packaging. 4520i processes at 225°C and 180°C, respectively, for etch and asher applications. This system is equipped with patented multi-notch ECR etchers for superior high-aspect-ratio etched features. The multi-notch etcher is composed of two primary parts: a gas distribution coil that is magnetized in the etching chamber, and two ceramic nozzles that serve as the etching sites. The gas distribution coil creates a uniform plume of etching gas to deliver a consistent process. The ceramic nozzles create a series of small etching ions that are focused into the substrate for a deep etch. LAM RESEARCH 4520i utilizes a high-speed microcontroller-based control unit, which allows for a variety of power, temperature, and pressure settings to be easily adjusted. The etching process is secured with a Programmable Logic Controller (PLC) that provides process automation and data logging capabilities. The air filtration machine also ensures clean operation. The benefits of choosing 4520i include cost-efficiency, excellent precision, high resolution, and high-throughput. With its variable etching area, wide depth of etching depths, and layer-by-layer etching capabilities, LAM RESEARCH 4520i can handle the most demanding requirements. By allowing etching of smaller via holes and other patterns, 4520i provides exceptional process control with minimal runoff and high yield rates. Finally, the high-precision automated control tool and monitoring capabilities make LAM RESEARCH 4520i an effective tool when it comes to etching and ashing applications.