Used LAM RESEARCH 4520i #9188609 for sale

LAM RESEARCH 4520i
Manufacturer
LAM RESEARCH
Model
4520i
ID: 9188609
Wafer Size: 8"
Vintage: 2004
Oxide etcher, 8" 2004 vintage.
LAM RESEARCH 4520i Etcher/Asher is a state-of-the-art, integrated machine for wafer etching and wafer ashing. This system is highly customizable and is capable of producing optimal etch and ash results for variety of applications. 4520i is designed for high precision etching and ashing of complex wafer structures, including III-V, silicon and MEMS materials, with superior accuracy and process repeatability. It is specifically designed to reduce cycle time and increase the yield of finished products. The machine is equipped with an advanced plasma delivery system that allows for high-powered plasma sources to be used, providing optimum etch and ash results. The etching process is controlled by a proprietary software package that is adjustable for different etching needs. The machine also boasts an advanced self-cleaning feature, ensuring that repeatable and consistent results can be guaranteed. Finally, the machine features a unique, in-situ temperature measurement to accurately control the etch depth, while also providing the ability to monitor during the etching and ashing processes. In short, LAM RESEARCH 4520i is an ideal solution for etching and ashing of complex wafer structures, with superior accuracy and repeatability, and is sure to provide high fidelity results.
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