Used LAM RESEARCH 4520i #9226619 for sale

LAM RESEARCH 4520i is a state-of-the-art, ultra-precise plasma etcher/asher, designed to handle the most demanding and precise etching requirements. This revolutionary tool provides wafer-level precision etches, with the option of 3 or 4 sided etching with optional multi-axis etching. 4520i utilizes a real-time closed-loop etching engine allowing for in-process control and process stability. This results in a high quality etch, with few process defects. LAM RESEARCH 4520i has a wide range of features designed for precise etching and ashing of wafers and substrates including a multi-mode process chamber, allowing for enhanced process control and improved process stability. The chamber design provides excellent uniformity and repeatability, and is highly flexible to a variety of substrate materials, with outstanding vacuum performance and low particle levels. The etcher can achieve a high level of accuracy, with a wide range of resolution options, achieving up to ± 0.5 micron accuracy. The advanced system architecture of 4520i allows for easy operator use with flexible process control and data acquisition. An intuitive graphical user interface facilitates set-up and operation of process parameters, as well as data logging of process runs. The unit is also equipped with a recipe-based programming feature, allowing for the future development of custom recipes unique to a specific process. LAM RESEARCH 4520i is a reliable and efficient plasma etcher/asher system, delivering consistent, high quality etch processes for optimum device yields. With it's advanced features, versatility and wide range of process options, the system is the ideal choice for research and development, as well as low-volume production applications. The integrated hardware and software provides comprehensive process control and ensures high yield rates, making 4520i an ideal choice for those needing a cost-effective, high-precision etcher/asher.