Used LAM RESEARCH 4520i #9292701 for sale

LAM RESEARCH 4520i is an advanced etcher/asher for semiconductor device manufacturing. This piece of equipment utilizes a plasma-assisted, isotropic etch process. It is well-suited for etching applications such as feature size reduction, planarity enhancement, B-ring removal, gas isolation layer formation, redistribution layer patterning, line edge shaping, and passivation layer patterning. 4520i features a Low Pressure-Capacitively Coupled Plasma source that provides superior non-uniformity control, uniformity and process repeatability. It is equipped with a high-density RF generator that allows for DC operation along with a low frequency auxiliary power supply for version bias control. An advanced process control equipment optimizes wafer throughput and process parameters. The etching system is capable of etching at rates up to 1.2 micrometers in minutes and is capable of supporting trench etching applications up to 100nm. LAM RESEARCH 4520i features several safety features such as gas diagnostics and advanced interlocks which ensure an around-the-clock safe operation of the unit. The advanced edge protection machine reduces risk of wafer breakage. The tool is designed for flexibility and expandability and can be modified to accommodate new and advanced processes. The asset is compatible with material sources such as Ar/NF3/C4F8, CHF3/CF4, NF3/O2 and O2/CHF3/CF4. 4520i contains a tool automation software that enables simultaneous multiple-tool control, as well as process parameter/recipe editing. The model is dedicated to helping users achieve the highest throughput with minimal defects and excellent process repeatability. The advanced end-of-run detection allows for timely SPC data collection for optimal wafer results. LAM RESEARCH 4520i is a reliable and dependable machine offering users the highest accuracy and precision for etching and ash processes. The etcher/asher is easy to install and maintain and provides users with a highly automated process with robust, repeatable results.