Used LAM RESEARCH 4520i #9399005 for sale

LAM RESEARCH 4520i is an advanced Etcher/Asher equipment designed for the production of electronic and optoelectronic components. The system is a sophisticated and flexible, high-throughput tool that offers superior etching/ashing capabilities with superior results. It achieves superior results by utilizing more precisely targeted ions to deliver exact etch patterns, while simultaneously decreasing etch and ashing time. 4520i is equipped with a single high-current, dual-ion gun design that offers superior etch rates of 10,000A/cm2 in the presence of a broad range of materials and etch chemistries. Its design simplifies alignment, which is key for producing high-quality etch features and enables the unit to process demanding substrates without introducing debris and particulates into the process chamber. The machine also features a long-throw, highly resilient plasma-injection module that allows for operation at low process pressures to minimize etch- and ashing-induced surface damage. LAM RESEARCH 4520i is a modular tool, allowing individual components to be changed or upgraded as needed over time to maintain optimal production and to accommodate new processes. The asset offers both standard and custom substrate handling, allowing for automated traversing. This is ideal for deposition and etching of non-planar surfaces and components that require precision alignment. Its temperature control model is capable of temperature modulation at different points of the substrate during etch/ash processes. It also features a state-of-the-art pressure monitor that keeps a close eye on etching and ashing pressures to ensure smooth, consistent processes. 4520i is suitable for a wide range of etching and ashing applications in the production of fine-tolerance components for the electronics industry. It is an ideal equipment for MEMS/NEMS, RF components, and optical components that require precision etching and ashing, and offers highly reliable and repeatable results. It is an excellent choice for demanding production applications that require high etch/ash rates, uniformity, and accuracy.