Used LAM RESEARCH 4528i #9167075 for sale

LAM RESEARCH 4528i is an etcher/asher designed to accurately etch and deposit thin films onto wafer surfaces. Its precision film deposition process combined with a reliable convection-based etching ensures reliable processing results. The equipment offers simple and efficient sample loading, unloading, and handling, making it ideal for a wide range of high-throughput applications. The LAM 4528i achieves excellent throughput rates and product quality with a low cost of ownership. It utilizes electrostatic chuck loading/unloading technology, a vacuum film deposition chamber, and a built-in plasma asher. The system is equipped with an automatic wafer locating unit, integrated wafer chuck environmental control machine and integrated sputtering hardware. The ability to precisely control the oxygen and nitrogen gas concentrations by measuring the pressure is incorporated via dedicated gas supplies and mass flow controllers. LAM RESEARCH 4528i is built for use with a wide range of materials including dielectrics, polymers and various metals. The tool has adjustable source, temperature and rotation speeds, this allows for an increased range of capabilities. The asset is also fitted with additional ports to allow for reactive gases and additional material sources to be pumped into the processing chamber. 4528i is innovative wafer etcher/asher, offering a high degree of versatility and precision to meet the needs of high-throughput production and research laboratories. The model is also simple to use and maintain, ensuring consistently reliable processing results. LAM RESEARCH 4528i's commitment to advanced technology and ease of operation makes it an attractive option for a wide range of thin film deposition and etching applications.