Used LAM RESEARCH 4600 #293807556 for sale

LAM RESEARCH 4600 is a state-of-the-art etcher / asher equipment designed for etching, ashing, and patterning conductive and non-conductive layers on a wide range of substrates. It is equipped with a production-ready isotropic etch capability, allowing for process throughput and wafer uniformity that meets or exceeds the industry standards. 4600 system features a 13.56 MHz inductively-coupled plasma (ICP) source for etching and ashing applications. It features a low RF generator power, allowing for precise etch control in critical process layers such as shallow junctions. The chamber size allows for large cassettes of up to 25" x 50". It also offers a dual frequency generator capable of etching on both alumina and dielectric hardmasks, providing an additional level of optimization in multi-material etch recipes. LAM RESEARCH 4600 also has both manual and automation capabilities, allowing customers to select the most productive operations for their production needs. It features an integrated robotic arm for recipe setup and wafer loading/unloading. The unit also uses a real-time Auto Recipe Optimization (ARO) machine to perform two-way parameter optimizations and make in-situ adjustments during processing. 4600 offers fast process times with precise recipes, providing both high throughput and optimal results. This enables customers to achieve cost savings and throughput increases with minimal operator intervention. The tool is also equipped with advanced process monitoring and diagnostics capabilities, enabling customers to troubleshoot and optimize their processes. This advanced asset provides unmatched process flexibility and control, allowing customers to produce reliable, high-performing products with a longer lifetime. LAM RESEARCH 4600 is the perfect choice for applications that require precision etching and high yields with minimal downtime.