Used LAM RESEARCH 4600B #9100790 for sale

LAM RESEARCH 4600B Etcher Asher is used for critical applications in semiconductor fabrication processes. This etcher asher is designed to provide reliable and uniform etching and ashing capabilities to help your process run at maximum capability with optimized process control. It features automated process integration for the delivery of consumables along with active shielding to eliminate the potential for exposure to hazardous chemicals. This equipment also utilizes a multi-zone gas delivery system for precise micron-level control of etchant and ash gases. 4600B is a multi-chamber chamber etcher/asher unit. It offers specific etching capabilities for dielectrics, polyimide, sputtered metals, and more. It also has a OneStep chamber for wafer coating as well as for metal oxide etching. The machine also features a 2-stage etch process to ensure repeatable process uniformity and optimum control. The first chamber offers a radical etch while the second chamber performs a clean and gentle finish etch. LAM RESEARCH 4600B also features process monitoring capabilities to help ensure that the complete etching process remains within specs. This process monitoring tool includes an Aperture Monitor to measure the etching rate, while also providing an overview of the entire process. Additionally, this asset also has a Pressure Indicator to help monitor the process pressure and a Gas Flow Monitor to keep track of the etchant/ash gas flow rate. 4600B also offers a host of robust constructions to ensure that the model runs without issue. It features four-zone load locking along with heavy-duty stainless steel construction for superior performance and reliability. It also has an integrated process exhaust equipment and multiple fail-safe mechanisms for improved safety and greater operational stability. In conclusion, LAM RESEARCH 4600B Etcher Asher provides repeatable, reliable etching and ashing capabilities in order to help fabricators run their processes at maximum capability while managing process controls. It features a multi-chamber design for dielectric and metal work, along with precise micron-level etching and gas delivery capabilities and process monitoring systems. The system also utilizes four-zone load locking and heavy-duty stainless steel construction for superior performance and reliability.