Used LAM RESEARCH 4720 #9272634 for sale
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LAM RESEARCH 4720 etcher / asher is a fully automated wet etching equipment that is designed to provide unsurpassed process quality and high throughput. This equipment is capable of performing both wet and dry processing functions in a wide range of metals and dielectrics. With a variety of pre-programmed functions, 4720 etcher / asher can process a variety of wafers that range from 8 inch to 200 mm. The fast etch rates and flexibility of the tool make it ideal for applications such as combination of high-density plasma etch, thin film deposition, photoresist ashing, and wet etching. LAM RESEARCH 4720 etcher/asher consists of three main components; the chemical delivery module, the chamber assembly and the power supply module. The chemical delivery module delivers etching solutions, photoresist solvents, and other chemicals during the etching process. The chamber assembly contains a Universal Barrel designed to support a wide range of etching applications and process options. The power supply module contains a high voltage power supply that supplies the high voltage needed for etching processes. The system also supports a variety of post-etching steps. The platform of 4720 etcher/asher enables the user to select an optimal process recipe and to monitor the process in real time. The integrated control unit of the tool provides the user with a wide range of control options that include the control of the gas flow and pressure, the control of the etching temperature, the control of the etch rate, and the control of the total processing time. Additionally, the user can monitor the process status, view live process videos, adjust the parameters of the process or save the data results during the etching process. LAM RESEARCH 4720 etcher/asher is designed to achieve the perfect balance between process and performance. It is designed to provide unparalleled process repeatability, performance, ease of use and maximum throughput. It is also designed for easy, safe operation and access to post etch peripheral equipment. The versatile 4720 etcher/asher machine provides a superior etching process that is suitable for many applications.
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